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Title: Performance Test Of Mems-Fabricated Critical Flow Venturi Nozzles
Author: Chih-Chung Hu, Win-Ti Lin, Cheng-Tsair Yang, Wen-Jay Liu
Source: Flomeko 2007
Year Published: 2007
Abstract: Four types of silicon sonic nozzles for the throat dimension around 90um are investigated at Reynolds number ranging from 6x10 to 8xl03. With a specially designed clamping holder, the silicon nozzle is able to operate at an upstream pressure of 13.8xl05Pa and the above. The critical pressure ratio for choking is insensitive to Re, for which the averaged value is about 0.36. The time length required for the silicon nozzle to reach thermal equilibrium with sonic flow is about 10 minutes. The maximum deviation of discharge coefficients obtained at five different individual days in two months is less than 0.02%, signifying a good long-term stability.

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