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Title: Ultra Low Flow Fast Primary Gas Prover
Author: Harvey Padden
Source: 2009 Measurement Science Conference
Year Published: 2009
Abstract: Traditionally, constant-pressure gas provers have been used in the range of 5 sccm to 50 slm. Our recent work with viscous-sealed provers has extended the range upward to 500 slm. However, there has been a growing demand for primary standards in the sub - 1 sccm range. We have built prototype provers designed for flows of approximately 0.1 to 20 sccm. Using a quartz tube and piston of 2.5 mm diameter and 5 micron diametric difference, we are initially experimenting with a measured piston path of 5 cm. This will allow 1 sccm flows to be measured in approximately 21 seconds

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