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Title: In Situ- Calibration Of Capacitance Manometers
Author: Johnny L. Hartley, Ernest C. Fuentes
Source: 1982 Measurement Science Conference
Year Published: 1982
Abstract: Repeated expansion of a known Pv quantity of gas has been used to provide in situ calibration of a capacitance manometer. This method has demonstrated two major advantages over the existing calibration method using an air piston gauge, (1) Corrections for thermal transpiration errors are determined which includes the influence of connecting tubing and the sensors elevated temperature. (2) A n increased calibration accuracy has been obtained. At a test pressure of 2 millitorr an uncertainty of less than 5% is estimated using the in situ calibration. At 2 millitorr the air piston gauge error is estimated to be approaching 100%. For test . pressures near 100 millitorr, in situ calibration parallels the accuracy of the piston gauge and is estimated to be 2.5%.

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