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Title: Ellipsometry Srms For Use In Semiconductors And Thin Film Measurements
Author: Mangum, B. W.
Source: 1990 Measurement Science Conference
Year Published: 1990
Abstract: The National Institute of Standards and Technology (NIST) offers Standard Reference Materials (SRMs) for use in high-precision thermometry. These SRMs, available through the Office of Standard Reference Materials, include pure metals to be used in the precise realization of temperatures of some of the defining fixed points of the International Temperature Scale of 1990 (ITS- 90) and some devices to be used directly in the precise realization of secondary fixed-point temperatures. The temperature range of these SRMs is from 0.5 K to 2053 C. This article will review the use and importance of thermometric fixed points in precision thermometry, SRMs providing such fixed points, and will discuss results achievable with these SRMs.

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