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Title: A Metrology Model For Submicrometer Dimensional Measurements
Author: James Potzick
Source: 1993 Measurement Science Conference
Year Published: 1993
Abstract: A model for the accurate. dimensional measurement of small planar objects is developed in term8 of the comparison of the images of the test object and a standard object in a measuring device. A length measuring instrument is thus a comparator. The calibration of the standard and the conditions necessary for a valid comparison rue discussed. The principles discussed here apply to many other types of measurement as well.

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