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Title: Progress In The Theory Of The Laminar Tube Thermal Flow Sensor
Author: Thomas O. Maginnis
Source: 2011 Measurement Science Conference
Year Published: 2011
Abstract: Thermal mass flow sensing is well established commercially for measurement and control of low gas flows in the semiconductor industry and elsewhere. Yet the basic theory of this critical flow sensing technology still remains poorly developed. For example, though it is well established that these sensors respond linearly to mass flow for all gases at sufficiently low flows, no analytical expression has been published that can accurately predict the slope of the response to a particular gas from the sensor design parameters and gas physical properties, even for the most simple commonly used sensor geometry. In contrast, once the response slope for one definite gas is empirically determined for a sensor, the slopes for all other gases can be accurately estimated by using the gas correction factors calculated from the gas physical properties.

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