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Title: Piezoresistive Chemical Sensors Based On Polymer Thin Films
Author: G. Gerlach, m. Guenther, J. Sorber, Z. Shi
Source: 2008 Measurement Science Conference
Year Published: 2008
Abstract: For several decades piezoresistive sensors had been one of the most important driving factors for the development of MEMS technology. Piezoresistive pressure sensors have still a MEMS market share of some 20 % and an annual growth rate of about 6.6 %. Already 20 years ago we proposed the usage of piezoresistive sensors for other measurands than just mechanical ones. Adding functionalised polymer coating which shows swelling due to other physical or chemical values leads to a similar deflection of the thin silicon bending plate like for pressure sensors. The present paper covers two applications: a) thin films of polyimide for humidity and gas sensors, and b) the hydrogel layers for the measurement of concentrations of particular chemical species in aqueous solutions.

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