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Title: Lasers Role In Modern Optical Metrology
Author: John J. Lee
Source: 1983 Measurement Science Conference
Year Published: 1983
Abstract: Optical Metrology has in recent years had a rebirth primarily due to the development of laser systems. This paper discusses two of the roles lasers play in modern optical metrology. First, the laser as a research and manufacturing tool must be characterized and calibrated. The calibration needs and basic characteristics of several lasers will be defined and discussed. Second, several examples of the laser as a measuring tool will be discussed.

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