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Title: Recent Advances In Ac-Dc Transfer Measurements Using Thin-Film Thermal Converters
Author: Thomas F. Wunsch, Joseph R. Kinard, Ronald P. Manginell, Thomas E. Lipe, Otis P. Solomon, And Kenneth C. Jungling
Source: 2002 Measurement Science Conference
Year Published: 2002
Abstract: New standards for ac current and voltage measurements, thin-film multijunction thermal converters (MJTCs), have been fabricated using thin-film and micro-electro-mechanical systems (MEMS) technology. Improved sensitivity and accuracy over single-junction thermoelements and targeted performance will allow new measurementapproaches in traditionally troublesome areas such as the low frequency and high current regimes. A review is presented of new microfabrication techniques and packaging methods that have resulted from a collaborative effort at Sandia National Laboratories and the National Institute of Standards and Technology (NIST).

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