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Title: The Challenge Of Semiconductor Metrology
Author: Judson C. French, Kenneth F. Galloway, Robert I. Scace
Source: 1983 Measurement Science Conference
Year Published: 1983
Abstract: Semiconductor technology has placed challenging demands on the metrologist to provide state-ofthe- art capabilities for measurements of dimensional, electrical, thermal, and other physical properties of semiconductor materials. devices, and circuits in a form suitable for meeting the practical needs of science and of industry and its customers. The National Bureau, of Standards is responding to these demands by providing generic new measurement methods, physical standards, and services, highlighted by examples given in this paper.

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