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Title: Uncertainty Procedure For NIST Surface Finish And Microform Calibrations
Author: J.F. Song, T.V. Vorburger
Source: 1996 Measurement Science Conference
Year Published: 1996
Abstract: An uncertainty procedure is used for reporting the NIST surface finish and microform calibration uncertainties. The combined standard uncertainty is a combination of the uncertainty from the geometric non-uniformity of the measured surface, and the uncertainty from the measuring system, which includes the uncertainties from the calibration and check standards, instruments, environment, measuring setup, and from the long-term variations. Theoretical and experimental methods for testing instrument repeatability and noise, stylus tip size, filter and nonlinearity are described. The relationships between the combined standard uncertainty and the calibration traceability, repeatability, and reproducibility are also discussed.

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