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Title: A Silicon Flow Sensor For Highly Accurate Mass Flow Measurement
Author: Michel J.A.M. Van Putten, Pascal F.A.M. Van Putten
Source: Flomeko 2000
Year Published: 2000
Abstract: We describe a thermal, silicon integrated, mass ow sensor for highly accurate mass ow mea- surements over a large dynamic range. Oset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically 1% of reading, with a turndown larger than 1:1000. keywords: thermal, silicon ow sensor, VanPutten-ADM

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