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Title: Low Cost Digital Flow Meters For Industrial Process Applications
Author: K. Peng C.Q.Zhouand W.H. Deng
Source: Flomeko 2013
Year Published: 2013
Abstract: Variable area flow meters or rotameters have been widely used for flow monitoring of industrial process, particularly where the cost is the first priority. However, with the constant demands for process digitization, remote data transmission, data log, flow level register and alarm triggered automation have been highly demanded. These characters are not available for the rotameters while the low cost barrier prevents other existing technology to provide the same solution. MEMS mass flow technology on the other hands, is ready to emerge for these applications. In this paper we present the working principle, design and performance of a series of MEMS flow meters that can be used to replace the rotameters. The all new digital flow meters meet all current digitization requirements while excel in performance at a very competitive cost.




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