Email Document Reference

Enter your email address below and the reference for this document will be sent to shortly from webmaster@ceesi.com.

Title: Automated Nondestructive Pbstm Measurements Of Surface And Subsurface Defect Distribution In Silicon And Gallium Arsenide Wafers
Author: Robert m. Silva, Fred D. Orazio, Robert B. Sledge
Source: 1985 Measurement Science Conference
Year Published: 1985
Abstract: Measurement of scattered light has become more important during the past few years because of the increased ability to use this information for evaluating supersmooth optics and the polished surfaces of other materials including semiconductor wafers. Single point measurements, even of scattered light, are also no longer sufficient for characterizing surfaces since it has been found that point-to-point variations can be far greater than had been suspected. The instrument described in this paper is a highly accurate scatter measuring system capable of taking more than 100 million data points in a 125 x 125mm square area and displaying that data in the form of a map. The maps can be used to analyze both the surface and subsurface characteristics of a test article and the information used as a feedback mechanism to change the production process toward improved quality. Automated, the measurement method can be used for nondestructive inspection (NDI) of wafers in a cassette-to-cassette incoming quality control system.

In order to prevent spam and automated file downloads for documents within the Measurement Library, please follow the instructions below and then you will be able to email a reference to this article.