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Title: 3D Mems In Standard Processes: Fabrication, Quality Assurance, And Novel Measurement Microstructures
Author: Gisela Lin, Russell A. Lawton
Source: 2001 Measurement Science Conference
Year Published: 2001
Abstract: Three-dimensional MEMS microsystems that are commercially fabricated require minimal post-processing and are easily integrated with CMOS signal processing electronics. Measurements to evaluate the fabrication process (such as cross-sectional imaging and device performance characterization) provide much needed feedback in terms of reliability and quality assurance. MEMS technology is bringing a new class of microscale measurements to fruition. The relatively small size of MEMS microsystems offers the potential for higher fidelity recordings compared to macrosize counterparts, as illustrated in the measurement of muscle cell forces.

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