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Title: Applications Of Microtechnology In Measurement Systems
Author: Douglas H. Baker, William P. Taylor
Source: 2000 Measurement Science Conference
Year Published: 2000
Abstract: Microelectromechanical Systems (MEMS), when viewed as a manufacturing technology tool, offers the potential for dramatic reduction in the size and cost of both sensors and actuators. In this paper the application of MEMS to both vacuum gauges and relays will be discussed. The vacuum gauge uses a combination of two micromachined pressure sensors to allow a single transducer to operate from 1 x 10-4 Torr to 103 Torr. In addition, a fully integrated magnetically actuated microrelay is described and packaging methods are discussed.

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