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Title: Cost Effective Mems Mass Flow Meters
Author: Kai Peng, Changming Jiang, Yongyu Liu, Wenhong Deng, Xiang Lan And Sugang Jiang
Source: Flomeko 2010
Year Published: 2010
Abstract: Cost effective flow meters are dominated by rotameters or variable area flow technology. These meters only measure instant volumetric flow rate with a low accuracy. In addition, the meters are not capable for temperature and pressure compensation as well as remote communication. With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. We present a series of MEMS mass flow meters that are cost compatible with the variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100mm. It is powered with battery and can be used as a stand-alone potable option.

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