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Title: A Calibrators Guide To The Use Of Vacuum Gages Between 0.01 And 100 Pa
Author: J. Patrick Looney
Source: 1995 Measurement Science Conference
Year Published: 1995
Abstract: Calibration service for vacuum gages has recently been extended at NIST with the completion of the NIST Primary Transition Range Vacuum Standard. This standard is designed to calibrate Ca : acitance Diaphragm Gages (CDGs) and Spinning Rotor Gages (SRGs) in the pressure range lo- and 100 Pa with total uncertainties less than 0.5% (2-u). We have found that the problem of accurate calibration of vacuum gages in the regime between 0.01 and 100 Pa is compounded by the fact that both SRGs and CDGs exhibit nonideal gage response and performance limitations the SRGs at the highest pressure, and the CDGs at the lowest pressures. In this paper we discuss the performance characteristics these gages and present typical performance data obtained with the new standard for SRGs and low-range (0.1, 1.0 Torr Full Scale) CDGs. We shall also discuss the useful range of operation of these gages and the typical measurement accuracy one may expect to achieve. Finally, we will point out aspects of gage performance that calibration laboratory users should be aware of when using CDGs and SRGs for gage calibration in this regime.

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