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Title: An Assessment Of, And Response To, Industrial Needs For Metrological Applications Of Scanned Probe Microscopy
Author: T.H. Mcwaid, J. Schneir
Source: 1995 Measurement Science Conference
Year Published: 1995
Abstract: NIST personnel visited over 25 semiconductor industry companies to determine semiconductor industry needs for scanned probe metrology. NIST has initiated programs addressing the shortcomings in the technical infrastructure impeding the successful application of scanned probe microscopy to process development and control measurements.

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