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Title: The Application Of Mems Technology To On-Line Analyzers For Natural Gas
Author: Johan Bats
Source: American Gas Association 2004
Year Published: 2004
Abstract: Recently MEMS technology has enabled a new level of performance for on-line natural gas analysis. MEMS (Micro Electro Mechanical Systems) technology combines mechanical and electronical techniques on a micro-scale. Using micro-machining processing steps developed by the IC industry, chip-level devices are created which not only allow for a significant improvement of the interaction between these 2 disciplines, but also provides a much better control of the processes which occur on this micro-scale. Gas chromatography is one of the most suited scientific disciplines for MEMS technology. Besides the obvious size reduction (with the associated decrease in production and installation costs) and the reduction in consumables (both power and gas consumption), MEMS technology has a major impact on the analytical performance.

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