Email Document Reference

Enter your email address below and the reference for this document will be sent to shortly from webmaster@ceesi.com.

Title: Mems Thermal Mass Flow Meters For Humidified Gases
Author: L.J. Huang C.C. Chen Y.N. Liu J.L. Ruan W.H. Deng
Source: Flomeko 2013
Year Published: 2013
Abstract: Measurement of gas with high humidity or gas converted from liquid phase is frequently encountered. Accurate metering is always a challenging process as the remaining liquid vapors may significantly affect the performance of the measuring unit. In this paper, we presented a novel design of a mass flow meter which is utilizing a single MEMS calorimetric mass flow sensor chip integrated with a substrate micro-heating circuitry. The results indicated that the design can effectively work for the gas flow measurement under the presence of high humidity or liquid vapors with no requirement of additional external heating assistance to avoid condensation that alternates the measurement results

In order to prevent spam and automated file downloads for documents within the Measurement Library, please follow the instructions below and then you will be able to email a reference to this article.