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Title: Self-Calibration And Error Compensation Using Reference Position Markers
Author: Huanyu Zou
Source: 2000 Measurement Science Conference
Year Published: 2000
Abstract: In this paper, reference position markers are proposed for self-calibration and error compensation. Self-calibration of x-y motion guides is discussed with a focus on the orthogonality calibration. An algorithm is developed using a closure method and reference position markers. The calibration uncertainty is estimated. Self-calibration of Abbe error is discussed: two sets of measurements made at different Abbe offsets combined with the use of reference position markers are proposed to develop an error map for Abbe error compensation. The limitation of pre-processed error compensation is also discussed.

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