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Title: Industrial Trends In Semiconductor Reference Materials
Author: James .I. Greed, Jr.
Source: 1995 Measurement Science Conference
Year Published: 1995
Abstract: The technical and quality challenges faced by the semiconductor industry are reflected and, in fact amplified by the gauge makers rule in the development, manufacture and certification of reference materials intended to serve the integrated circuit community. This paper examines the general contemporary trends in technology and business practices as they affect the production and evolution of reference materials. Three specific technical areas are discussed particle detection and metrology in contamination free manufacturing, thin film metrology and surface topography. The utility of the National Technology Roadmap for Semiconductors in guiding the evolution of reference materials is also discussed.

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