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Title: Development Of A Gas Micro Flow Transfer Standard
Author: J. Barbe F. Boineau F. Dijoux T. Mace P. Otal
Source: Flomeko 2013
Year Published: 2013
Abstract: LNE has ability to calibrate micro gas flow rates using the dilution method in the range from 2 g/s to 200 g/s of nitrogen or 0.75 g/s to 30 g/s of helium. In addition, a primary constant pressure flowmeter for leak rates measurements from 0.05 g/s to 35 g/s is also available. In order to compare these reference facilities and to validate the dilution method below 30 g/s, LNE is developing a micro flow transfer standard (FTS) with the collaboration of ATEQ France, manufacturer of control equipments for leak test. The owmeter consists mainly of an array of three stainless steel capillaries designed to cover the ranges from 0.035 g/s to 0.35 g/s, 0.35 g/s to 3.5 g/s and 3.5 g/s to 35 g/s of nitrogen (0.1 ml/h to 100 ml/h). A dynamic model of the FTS determines the mass ow rate from the input pressure, the differential pressure of the capillary, the gas temperature, the gas properties (viscosity and density) and the dimensional parameters of the capillary (length and radius). The comparison of both reference methods was carried out with the FTS from 0.35 g/s to 35

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