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Title: A New Primary Gas Flow Standard For Flow Rate Measurement From 0.001 To 1000 Nano mol/S
Author: Wu Jian, Chua Hock Ann
Source: 2006 International Symposium on Fluid Flow Measurement
Year Published: 2006
Abstract: A primary gas flow standard was designed and developed in SPRING for the calibration of gas flow meters or leak rate standard at nano-flow rate range of 10-6 to 10-12 mol/s. It is also used to generate very low gas flow for SPRINGs continuous expansion vacuum primary standard. The primary standard consists of two piston-cylinder flow units with diameters of 10mm and 25mm, which provide wider measurement ranges. A stepping motor is used to drive the piston moving at precise speed via a digital micrometer. Two methods, constant pressure method and constant volume method12, are used for the measurement of flow rate. Flow meters can be calibrated automatically using a software program developed at SPRING. The expanded measurement uncertainty of the primary gas flow standard is estimated to be 1% of the readings.




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