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Title: High Trequency And Static Capacitance Kasuremnt Technique On Linear Parametric Testers
Author: L. Cutai, S. Hylroie, T. Hazendonk
Source: 1985 Measurement Science Conference
Year Published: 1985
Abstract: The combined high frequency and static capacitance- voltage technique is a well-known tool in characterizing metal-oxide-semiconductor MS) structures. Understanding of the physics and controlling the properties of those structures have a great impact on the performance, yield and further development of HDS devices

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