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Title: An Instrument For Gravimetric Calibration Of Flow Devices With Corrosive Gases
Author: J. . Hylton, C. J. Remenyik
Source: 1999 International Symposium on Fluid Flow Measurement
Year Published: 1999
Abstract: An instrument was developed for the direct mass flow calibration of gas flowmeters that does not require measurement of temperature, pressure, or specific volume. This instrument measures the weight of gas collected in a container and makes measuring those thermodynamic variables unnecessary. The need to measure the weight of the gas container is eliminated by submerging it in a liquid (presently water) and balancing its weight with the force of buoyancy. The accuracy of this Gravimetric Calibrator is unaffected by the pressure and temperature of the gas. The Calibrator can also measure reactive, corrosive, and non-ideal gases. The container remains connected to the process by a torsion capillary, and a load cell measures the changing gas weight continuously throughout the measuring process. A prototype was designed for gas flows ranging from 1 sccm of hydrogen to 10,000 sccm of tungsten hexafluoride, constructed, tested, and used to calibrate flow devices. Experience with the prototype and results are presented, and plans for further developments are discussed.

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