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Title: A 193 Nm Laser Detector Nonlinearity Measurement System
Author: D. Keenan, H. Laabs, S. Yang, m. Dowell
Source: 2003 Measurement Science Conference
Year Published: 2003
Abstract: To meet the semiconductor industrys demands for accurate optical measurements, we have developed a method to characterize the nonlinear response of detectors used with 193 nm excimer lasers. The system we employ is referred to as the correlation method since the response of the detector under test is measured against a linear monitor detector. This system is complementary to our other excimer laser power and energy calibration services and provides a quantitative measurement of a detectors response over a large range of power or energy. Detectors are typically used over a larger range of power or energy than that covered by a single calibration point. Measurement uncertainty can be introduced if the response as a function of power or energy is not quantified. Range discontinuity, such as changing the detectors amplification, can also introduce additional measurement uncertainty. Experimental results revealed nonlinearity of some UV detectors as high as 8 %.

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