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Title: Multilayer Ceramic Technology Applications To Mass Flow Control
Author: Mario R. Gongora-Rubio, Luis m. Sola-Laguna, Jorge J. Santiago-Aviles
Source: Flomeko 2000
Year Published: 2000
Abstract: Micro-fluidic devices suitable to MFC were fabricated using LTCC technology from the emerging field of Meso-Scale systems. A multiplicity of hybrid devices can be developed using this flexible technology because this is a hermetic and compatible material ideal for fluidic systems

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