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Title: Thermal Mass-Flow Sensor Zero Offset
Author: Chiun Wang
Source: 2006 Measurement Science Conference
Year Published: 2006
Abstract: Thermal mass-flow sensors are normally calibrated only with an inert gas before they are used for measuring the flow of process gases. It was frequently observed that the sensor zero-offset shifts slightly when the process gas is introduced, even after the sensor has been zeroed perfectly with the inert gas. This study shows how gas thermal conductivity can affect the no-flow output of a thermal mass-flow sensor with imperfect symmetry.

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