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Title: Novel Transducers For Ultrasonic Flow Measurement
Author: I. Ladabaum, K. D. Patel, A. J. Cittadine
Source: 1999 International Symposium on Fluid Flow Measurement
Year Published: 1999
Abstract: Recent developments in microfabrication technology have spurred novel designs of ultrasonic transducers. This paper presents the characterization and modeling of capacitive microfabricated ultrasonic transducers. Such transducers, which are made using the techniques of the semiconductor in- dustry, can transmit and receive ultrasound in both liquids and gases. Trans- mission has been demonstrated in air at atmospheric pressures at frequencies from 1 MHz to frequencies in excess of 10 MHz. The devices have a dynamic range of at least 110 dB at a bandwidth of approximately 5%. Devices with bandwidths of approximately 50% have been realized, but have a dynamic range of approximately 90 dB. Preliminary data indicates that the devices are extremely broad band in high pressure environments, though at the time of press conclusive data was not available. Data is presented which demon- strates that no substrate cross-coupling between array elements is observed in air, thus conrming the feasibility of beam steering applications. Broad- band transmission has also been demonstrated in liquids. Transmission from 1 MHz to 20 MHz has been observed width bandwidths in excess of 50% in the low MHz range. Capacitive microfabricated ultrasonic transducers are anticipated to enable new generations of ow measurement devices.

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