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Title: Implications Of Semi Standard E12-0303 On Volumetric Flow Reporting
Author: Chiun Wang, Bill Valentine
Source: 2005 Measurement Science Conference
Year Published: 2005
Abstract: SEMI standard E12-0303 (formerly E12-96) defined the standard flow rate as the volumetric flow rate of the gas at the standard density, with the standard density defined as the molecular weight divided by 22413.6 grams per cubic centimeter. When the flow rate is measured by using a mass-measuring instrument, the SEMI standard provides a method for calculating the exact number of moles of fluid delivered. However, when the gas flow rate is measured by using a volumetric device, such as a bell-prover or a piston-prover, where the volume rather than the mass is the measurand, the above definition cannot be directly applied to the calculation of the standard flow rate. A clear method is lacking in SEMI E12-0303 for calculating the standard flow rate from volumetric measurements. For gases with welldocumented equation of state, this article justifies the inclusion of the compressibility factor in converting the volumetric flow rate into the standard flow rate. It also reviews the impact of the compressibility factor on the use of Boyles law and Charles law.

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