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Title: Performance And Calibration Of Capacitance Diaphragm Gauges
Author: John J. Sullivan, Frank L. Uttar
Source: 1986 Measurement Science Conference
Year Published: 1986
Abstract: Capacitance diaphragm gauges have become widely used as transfer standards for the calibration of many other types of pressure and vacuum gauges over the pressure range of 3.3MPa (25000 mmHg) to 1.3mPa (10W5) mmHg), nine decades of total pressure measurement. It is the purpose of this paper to provide details on the performance characteristics of present state of the art capacitance diaphragm transducers and the calibration techniques for this type of pressure transducer, both primary and transfer. In addition the proper use of the gauges as transfer standards for calibration of other gauges will be addressed.