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Title: Development Of A Noncontacting Contour Measuring Device.
Author: Burton D. Figler, Alfred R. Ouellette, Jack L. Deshurley
Source: 1984 Measurement Science Conference
Year Published: 1984
Abstract: f i ve-ax is noncontacting contour measuring device is described which is designed to provide absolute accuracies in the range of + 10 to + 30 microinches. The emphasis in this paper is on the stage measurement accuracy which has been demonstrated to be better than 2 10 microinches, using a two-axis laser interferometer coordinate measuring system and a unique thermally stabilized frame.