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Title: The Art Of Interferometric Flatness Measurement
Author: Steven Toothaker
Source: 2005 Measurement Science Conference
Year Published: 2005
Abstract: Flatness assessment of reflective surfaces using interferometric techniques is in common use everyday. The simplicity of the technique is such that an unskilled technician can learn quickly how to evaluate surface flatness error as small as several millionths of an inch. There are several methods of interferometeric flatness measurement in common use, but each method has distinct advantages and disadvantages. This paper will help you determine the best methods for your laboratory to utilize to meet your customers needs.

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