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Title: Graphical Analyses Related To The Linewidth Calibration Problem
Author: Mary Carroll Croarkin
Source: 1986 Measurement Science Conference
Year Published: 1986
Abstract: It is the intent of this paper to demonstrate that graphical analyses, when properly understood, can often supplant more formal statistical analyses, and in all cases enhance such analyses. Statistical tests, which reduce the information in the data to a one line yes or no finding, are referenced to support the graphical findings. The power of this approach is illustrated with a measurement problem that led to the development of Standard Reference Material SRM-475. Assessment of the extent of the measurement problem in the integrated circuit industry and procedures for evaluating system performance are discussed.